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HCL
HCL_500kg(Drum)
HCL_25kg(Cylinder)_JIS
HCL_25kg(Cylinder)_CGA
Polished wafer/Epitaxial wafer
4inch_N_As_ ≤0.005 Ω.cm_2flat
4inch_P_Boron_≤0.005 Ω.cm_2flat
4inch_P_Boron_1-10 Ω.cm
6inch_N_As _≤0.005 Ω.cm
6inch_P_Boron_≤0.005 Ω.cm
6inch_P_Boron_1-10 Ω.cm
EPI_6inch_N_15±0.75 Ω.cm
EPI_6inch_N_18.54±5% Ω.cm
EPI_6inch_P_5.94±5% Ω.cm
EPI_8inch_N_0.31±10% Ω.cm
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Home
HCL
HCL_500kg(Drum)
HCL_25kg(Cylinder)_JIS
HCL_25kg(Cylinder)_CGA
Polished wafer/Epitaxial wafer
4inch_N_As_ ≤0.005 Ω.cm_2flat
4inch_P_Boron_≤0.005 Ω.cm_2flat
4inch_P_Boron_1-10 Ω.cm
6inch_N_As _≤0.005 Ω.cm
6inch_P_Boron_≤0.005 Ω.cm
6inch_P_Boron_1-10 Ω.cm
EPI_6inch_N_15±0.75 Ω.cm
EPI_6inch_N_18.54±5% Ω.cm
EPI_6inch_P_5.94±5% Ω.cm
EPI_8inch_N_0.31±10% Ω.cm
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